[ Problem Point ]
We have no idea about Silicon wafer easy heating.
[ ⇒Kaizen Point ]
The high temperature Nitrogen gas was injected with the Air Blow Heater, and the top surface temperature was adjusted to 40O℃.
The Silicon wafer inspection system by became possible though it did not make to the vacuum.
Related page:
No.68 Manufacturing of dryness steam of electric boiler 
No.52 Aging of electronic components 
No.63 Heating of the movable 
No.64 Metal Parts Drying after Washing 
No.71 Manufacturing of superheated steam 
No.77 Heating of tungsten material 
No.78 Dryness of Silicon wafers by the Nitrogen gas 
No.85 Breeze nitrogen heating of powder metal for 3D printer