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No.78 Dryness of Silicon wafers by the Nitrogen gas

Dryness of Silicon wafers by the Nitrogen gas  by the Air Blow Heater

[ Problem Point ]

The marks of water drop remained and were worrisome when natural drying was carried out.

[ ⇒Kaizen Point ]

Nitrogen was heated with the Air Blow Heater and it dried.
The marks of water drop were lost,and since there was also no oxidization, grace improved.

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