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No.21 Heat source of CVD Reactor Using Concerntrated Infrared Heater

Heat source of CVD Reactor Using Concerntrated Infrared Heater by the Halogen Point Heater

[ Problem Point ]

The heating furnace with controllability, that is highly compact and high energy efficiency was required.

[ ⇒Kaizen Point ]

The use of a Halogen Point Heater that can be high-temperature heating in a short time.
Heating process energy efficient can be realized in a small.

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