No.13 Insulating silicon wafers in a load lock chamber

[ Problem Point ]

We were looking for a circular heater that would fit the wafer.

[ ⇒Kaizen Point ]

We used the carbon ring heater CFRH.
The size was just right.
The heater space became smaller.

Related page:

No.1 Drying 300mm silicon wafers after precision cleaning No.1 Wire bundling No.12 Connector insulation No.10 bamboo decoration No.2 Rust and corrosion prevention of reinforcing bars No.11 Insulation of round terminals No.8 twig decoration No.5 Waterproof protection for PVC pipes