HEAT-TECH

No.81 Heating precursor gas in semiconductor manufacturing process

HEAT-TECH info

[ Problem Point ]

We were considering heating the precursor gas in order to make the chemical reaction proceed efficiently on the substrate surface.

[ ⇒Kaizen Point ]

Heating was done by installing halogen line heaters facing each other. Since it can be easily installed on piping, capital investment is reduced.

 

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