CFLH

No.1 Drying 300mm silicon wafers after precision cleaning

[ Problem Point ]

There was no good heater to rapidly evaporate the water droplets on the silicon wafer.

[ ⇒Kaizen Point ]

The material was dried by irradiating it with mid-infrared rays using a carbon line heater CFLH.
The absorption wavelength matched, so the water droplets evaporated immediately.
This resulted in a reduction in takt time.

Related page:

No.42 Drying of silicon wafers No.78 Dryness of Silicon wafers by the Nitrogen gas 6-1.The most efficient drying method-Combination of the hot air drying and the infrared ray drying Overview of the carbon heater 5-2.Heat balance equation of Infrared ray drying No.4 Drying screw holes after cleaning No.80 Drying of silicon powder in the process of recycling waste liquid discharged from the semiconductor manufacturing process Carbon Line Heater CFLH-40 series