No.1 Drying 300mm silicon wafers after precision cleaning

[ Problem Point ]

There was no good heater to rapidly evaporate the water droplets on the silicon wafer.

[ ⇒Kaizen Point ]

The material was dried by irradiating it with mid-infrared rays using a carbon line heater CFLH.
The absorption wavelength matched, so the water droplets evaporated immediately.
This resulted in a reduction in takt time.