[ Problem Point ]
In order to improve the uniformity of the coating liquid, it was necessary to preheat the spin coater chuck holder to an appropriate temperature. However, the conventional heating method had issues such as slow temperature rise, leading to reduced throughput. Additionally, securing installation space for the heating device was also a challenge.
[ ⇒Kaizen Point ]
By using the Carbon line heater, the preheating time of the chuck holder was significantly reduced. Furthermore, the compact design of the Carbon line heater contributed to space savings, ultimately improving production efficiency.
Related page:
No.14 Shortening the Drying Time of the Coater 
No.47 Preheating of Carbon Cloth 
No.19 Molding preheating of rubber 
No.16 Annealing Process of SiC Wafers 
No.17 Drying of Temporary Fixing Adhesive 
No.28 Preheating and heating of bonding of reversible cloth 
No.72 Preheating before welding 
No.79 Preheating carbon fiber reinforced thermoplastic (CFRTP) before molding