[ Problem Point ]

There was no easy precision heating method for semiconductors.

[ ⇒Kaizen Point ]

It was heated to a high temperature using a halogen point heater.
Stabilized heating at an arbitrary temperature by feedback control with near infrared ray that is easily absorbed by metal.
The equipment became smaller and it became easier to apply for research funds.
In addition, since high temperature heating can be performed instantaneously, screening efficiency has been improved.