[ Problem Point ]
We have no idea how to heat semiconductor wafer in the vacuum chamber.
[ ⇒Kaizen Point ]
Heated by the Halogen Line Heater.
Since the maximum temperature heated up in 5sec, immediately after the start of operation could work.The idling time vanished, the current spending 30 minutes in idling until PID steady.In addition, the amount of electric use decreases, and the exhaust of CO2 has decreased, too.