[ Problem Point ]
Traditional heat sources had slow heating rates, which led to extended drying processes, potentially reducing throughput.
[ ⇒Kaizen Point ]
By using a Carbon line heater tuned to the infrared absorption frequency of water, rapid and uniform drying of components after cleaning is achieved, improving throughput and contributing to optimized production efficiency. Furthermore, the compact design of the Carbon line heater facilitates space-saving and allows flexible equipment layout.
Related page:
No.14 Shortening the Drying Time of the Coater 
No.20 Heat Source for Pre-Baking of Resist Film 
No.22 Heat Source for Post-Bake 
No.16 Annealing Process of SiC Wafers 
No.17 Drying of Temporary Fixing Adhesive 
No.15 Small Lot Drying of Resin Pellets 
No.18 Speeding up the Dehydration Bake 
No.19 Preheating of the Spin Coater Chuck Holder