[ Problem Point ]
In the semiconductor manufacturing process, pre-baking of the resist film is a crucial step to ensure film quality stability. However, conventional heat sources have slow heating rates, leading to decreased throughput and negatively impacting production efficiency. Additionally, securing installation space for the heat source has been a challenge.
[ ⇒Kaizen Point ]
By using the Carbon line heater for pre-baking the resist film, rapid and uniform heating is achieved. Furthermore, the high-speed heating capability enhances throughput, contributing to optimized production efficiency. Additionally, the Carbon line heater’s compact design enables space savings and allows for a more flexible equipment layout.
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