[ Problem Point ]
Conventional heat sources have slow heating rates, which may hinder throughput improvement.
[ ⇒Kaizen Point ]
By using the Carbon line heater for post-exposure bake (PEB) of the resist film, rapid heating becomes possible. The fast heating process enhances throughput and contributes to the optimization of production efficiency. Additionally, the compact design of the Carbon line heater enables space savings and allows for a more flexible equipment layout.
Related page:
No.20 Heat Source for Pre-Baking of Resist Film 
No.19 Preheating of the Spin Coater Chuck Holder 
No.12 Heat Source for Measuring Thermal Deformation of Printed Circuit Boards 
No.18 Speeding up the Dehydration Bake 
No.16 Annealing Process of SiC Wafers 
No.14 Shortening the Drying Time of the Coater 
No.9 Heat source of heat shrink tunnel 
No.11 Heat source of drying oven