[ Problem Point ]
Traditional heat sources had a slow heating rate, which could lead to decreased throughput.
[ ⇒Kaizen Point ]
By using the Carbon line heater for the post-bake of the resist film, rapid heating became possible. The increased heating speed improves throughput and contributes to the optimization of production efficiency. Furthermore, the compact design of the Carbon line heater enables space-saving installation and allows for a more flexible equipment layout.
Related page:
No.21 Heat Source for Post-Exposure Bake (PEB) 
No.20 Heat Source for Pre-Baking of Resist Film 
No.14 Shortening the Drying Time of the Coater 
No.18 Speeding up the Dehydration Bake 
No.16 Annealing Process of SiC Wafers 
No.19 Preheating of the Spin Coater Chuck Holder 
No.9 Heat source of heat shrink tunnel 
No.12 Heat Source for Measuring Thermal Deformation of Printed Circuit Boards