[ Problem Point ]
Increasing the speed of the production line is essential, but conventional heaters have size and shape limitations, making efficient heating difficult.
[ ⇒Kaizen Point ]
By using a Carbon line heater, we have achieved a compact design with a heating length of 475mm and a 40cm square size. This enables heating at the required speed, improving throughput. Additionally, the small and efficient design of the Carbon line heater contributes to space savings and allows for flexible changes in equipment layout.
Related page:
No.21 Heat Source for Post-Exposure Bake (PEB) 
No.20 Heat Source for Pre-Baking of Resist Film 
No.22 Heat Source for Post-Bake 
No.14 Shortening the Drying Time of the Coater 
No.24 Preheating of Printed Circuit Boards in Reflow Soldering Ovens 
No.9 Heat source of heat shrink tunnel 
No.19 Preheating of the Spin Coater Chuck Holder 
No.23 Robot Washer Drying